The micro vacuum pump can run idle and dry for a long time, and it does not need lubricating oil and vacuum pump oil, and does not pollute the working medium. It has the advantages of small volume, low noise, maintenance free, and can run continuously for 24 hours. It is widely used in gas sampling, gas circulation, vacuum adsorption, accelerated filtration, car vacuum assist and other occasions as a cardiac power equipment in many fields Automation, medical treatment, health care, scientific research, environmental protection and other fields have been widely used, vigorously promoting the speed of industry 4.0, and actively responding to the national policy of energetically promoting energy conservation and environmental protection, are replacing the old oil vacuum products with amazing speed. Moreover, through the micro vacuum pump, small vacuum pump and micro air pump integrated with sensor, vacuum meter and single chip microcomputer monitoring system, the key parameters of the vacuum pump such as "vacuum degree (negative pressure)" and "flow" can be adjusted in real time and automatically, and various functions such as "vacuum pressure maintaining", "automatic timing stop and start", timing and quantitative "vacuum pumping and filtering" can be completed. It meets the needs of vacuum intelligent and automation equipment in the era of industry 4.0. It can be predicted that the development of micro vacuum pump will highlight one of the more important power equipment in the industry 4.0 era.